Epitaxy: Physical Principles and Technical Implementation Hardcover - 2004 - 2004th Edition
by Marian A. Herman; W. Richter; Helmut Sitter
From the rear cover
Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth.
Details
- Title Epitaxy: Physical Principles and Technical Implementation
- Author Marian A. Herman; W. Richter; Helmut Sitter
- Binding Hardcover
- Edition number 2004th
- Edition 2004
- Pages 525
- Volumes 1
- Language ENG
- Publisher Springer
- Date 2004-01-22
- Illustrated Yes
- Features Bibliography, Illustrated, Index, Table of Contents
- ISBN 9783540678212 / 3540678212
- Weight 1.88 lbs (0.85 kg)
- Dimensions 9.94 x 5.86 x 0.98 in (25.25 x 14.88 x 2.49 cm)
- Library of Congress Catalog Number 2003059146
- Dewey Decimal Code 621.381
Media reviews
Citations
- Choice, 10/01/2004, Page 321
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Epitaxy: Physical Principles and Technical Implementation (Volume 62)
by H. Sitter,M. A. Herman,W. Richter
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Epitaxy: Physical Principles and Technical Implementation [Hardcover
by Herman, Marian A.; Richter, W. and Sitter, Helmut
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Epitaxy : Physical Principles and Technical Implementation
by Marian A. Herman
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