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Epitaxy: Physical Principles and Technical Implementation
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Epitaxy: Physical Principles and Technical Implementation Hardcover - 2004 - 2004th Edition

by Marian A. Herman; W. Richter; Helmut Sitter


From the publisher

This book is written in a uniform and comprehensive style. It provides the readers with fundamental and up-dated knowledge on all aspects important of epitaxy and epitaxial growth techniques. It is easy to read by both newcomers in the field as well as the experienced specialists in this film technology and characterization.

From the rear cover

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth.

Details

  • Title Epitaxy: Physical Principles and Technical Implementation
  • Author Marian A. Herman; W. Richter; Helmut Sitter
  • Binding Hardcover
  • Edition number 2004th
  • Edition 2004
  • Pages 525
  • Volumes 1
  • Language ENG
  • Publisher Springer
  • Date 2004-01-22
  • Illustrated Yes
  • Features Bibliography, Illustrated, Index, Table of Contents
  • ISBN 9783540678212 / 3540678212
  • Weight 1.88 lbs (0.85 kg)
  • Dimensions 9.94 x 5.86 x 0.98 in (25.25 x 14.88 x 2.49 cm)
  • Library of Congress Catalog Number 2003059146
  • Dewey Decimal Code 621.381

Media reviews

Citations

  • Choice, 10/01/2004, Page 321
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Epitaxy: Physical Principles and Technical Implementation (Volume 62)
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Epitaxy: Physical Principles and Technical Implementation (Volume 62)

by H. Sitter,M. A. Herman,W. Richter

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Epitaxy: Physical Principles and Technical Implementation [Hardcover
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Epitaxy: Physical Principles and Technical Implementation [Hardcover

by Herman, Marian A.; Richter, W. and Sitter, Helmut

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Epitaxy : Physical Principles and Technical Implementation

Epitaxy : Physical Principles and Technical Implementation

by Marian A. Herman

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